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Multiple filter options for maximize signal: noise ratios. Multiple filter
options for maximize signal: noise ratios.
Many types of electronic filters are resident in the system, including
two-dimensional filtering, all software settable. Additionally, the effect
of various thresholds and filters on the defect image can be tested after the defect is captured. This is an INVALUABLE tool to allow
simple and fast establishment of classification rules.
Streak and Scratch detection.
Fine streak and scratches, oriented in the machine direction, often
produce very low signal levels. To detect these, a special hardware
module must perform the detection in parallel to the rest of the
detection electronics. This ensures detection of all defects even
during periods of high defect loading.
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Accurate defect tracking, in MD and CD.
Defect position is tracked precisely in both machine-direction and
cross-direction.
Coating uniformity module.
Unique coating uniformity module allows coaters to detect some
degree of coating irregularity with special noise measurement
algorithms.
Real time operating system.
System architecture is based on real-time, proprietary operating
system. Linux is employed between the real-time code and the
operator station.
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